| New AT200M | AT410/610/810 | New AT 650T | New AT 650P |
|---|---|---|---|
 |  |  |  |
| Desktop (W: ~11” (27.9cm) x D: 15” (38.1cm) x H: 14.5” (36.8cm)) | Desktop (W: 23” (58.6cm) x D: 23” (58.6cm) x H: 15” (40.5cm))[610 D: 25″ (63.5cm)] | Desktop (W: 15” (38.1cm) x D: 15” (38.1cm) x H: Less that 38” (96.5cm)) | Desktop (W: 15” (38.1cm) x D: 15” (38.1cm) x H: 38” (96.5cm)) |
| Sample Size = 2 inch (x2) up to 2 x 2 x 2” volume | 410 = 4 inch; 610 = 6 inch; 810 = 8 inch | 6 inch | 6 inch |
| Thermal to 250°C | Thermal to 300°C | Thermal to 400°C (upgradeable to Plasma) | Plasma and Thermal to 400°C |
| One Precursor/Two Counter Reactants | Three Precursors/Two Counter Reactants | Four Precursors/Four Counter Reactants | Four Precursors/Four Counter Reactants |
| Heated Precursor to 150°C | Heated Precursor to 150°C (N2 Assist Available) | 3 Precursors to 185°C, 1 at RT | 3 Precursors to 185°C, 1 at RT |
| All stainless steel chamber and metal sealed stainless lines | All aluminum chamber (hot walled) and metal sealed stainless lines | All aluminum chamber (warm walled) and metal sealed stainless lines and chuck | All aluminum chamber (warm walled) and metal sealed stainless lines and chuck |
| Heated lines and fast pulsing ALD valves | Heated lines and fast pulsing ALD valves | Heated lines and fast pulsing ALD valves | Heated lines and fast pulsing ALD valves |
| Ultrafast MFC | Ultrafast MFC | Up to four ultrafast MFCs | Up to four ultrafast MFCs |
| 5” Display w. Integrated PLC | 7“ Display with integrated PLC | 10“ Display with integrated PLC | 10“ Display with integrated PLC |
