The ATOzone (Ozone Generator) system utilizes high quality components that deliver high concentration (up to 12%) ozone in a very small form. The system does not require expensive and bulky water cooling. The built-in high velocity fans keep the plasma cell cool even during prolonged or constant use.
Manual or automatic switching between ozone, oxygen and off positions.
- Ozone production range: 12% by weight at low flow, 6% at high flow.
- Integrated O2 regulator: 3 – 29 psi
- High capacity ozone destructor for off-cycle ozone flow
- Can be controlled by 3 – 24V input signal
- Override switch for manual ozone control
- Front panel switch for O2 or Ozone output selection
- Ozone production range: 12% by weight at low flow, 6% at high flow.
- Integrated O2 regulator: 3 – 29 psi
- High capacity ozone destructor for off-cycle ozone flow
- Can be controlled by 3 – 24V input signal
- Override switch for manual ozone control
- Front panel switch for O2 or Ozone output selection
- Ozone production range: 12% by weight at low flow (250 sccm) to 6% at high flow (2500 sccm)
- Corona cell made from aluminum w/ ceramic dielectric
- Operating Frequency: 5,000 – 30,000 Hz
- Oxygen/Ozone Flow Range: 25 – 2500 sccm w panel integrated flow control
- Integrated O2 regulator: 3-29 psi range
- 3-24V DC input signal required for automatic ozone control
- 110 – 220 VAC, 60/50 Hz, 2A
- Weight 15 lbs
- Dimensions: 10.3” W x 7.5” H x 20” D
Ozone Safety Monitor
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- Monitored and integrated with AT series system
- Detects up to 5000ppb or 5ppm
- Green: ozone level is below 1500 ppb
- Yellow: ozone level 1500ppb to 3500 ppb
- Red: ozone level greater than 3500ppb
- Real time detection of ambient ozone gas
- Temperature & Humidity detection
- Wall mount with LCD display
- Provides one on/off dry contact relay output to control ozone generator
- Will come prewired to the ozone generator for automatic shutoff
- See ATOzone – Installation and Operation Manual for exact details and more safety precautions:
- Input of 98+% oxygen recommended (at least 90% pure required) at back input tube (1/4″ Swagelok compression fitting)
- Exhaust port (1/4″ Swagelok compression fitting) capable of handling 0.5 scfh of pure O2 to the appropriate roof top exhaust or equivalent.
- Ozone comes out of front port (1/4″ Swagelok compression fitting) and should be connected to ALD tool (which is also properly exhausted).
- Connect power cable to back (standard 110-220VAC)
- Turn (O2) pressure valve on front to 15 psi and gauge to 0.2 to 0.4 scfh
- Switch at front should now be positioned to O3 (ozone)
- If all connections have already been made then when a + 3 to 24V control signal is given the valve controlling O2 flow will open (ozone will be generated). Make sure exhaust is hooked up properly, beforehand! DO NOT EXHAUST TO ROOM AT ANY TIME.
- Ozone can also be produced by lifting red protector on back and flipping manual ozone switch up.
– Now turning on the front panel ozone switch (O3) will send ozone to the front port (into properly exhausted ALD tool). - Closing protective flap on back shuts off the ozone.
- Always keep a positive pressure of oxygen flowing on the system when connected to a vacuum system. Pulling a vacuum on the ATOzone system will void warranty.
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