Browse Anric Technologies’ full line of desktop ALD systems and equipment for research to pilot lines, from thermal ALD equipment to plasma ALD equipment. Shop by size and capability, or compare our systems using the button below.
Anric Technologies’ ATOzone (Ozone Generator) system utilizes high quality components that deliver high concentration (up to 12%) ozone in a very small form.
The AT610 is the most cost-effective 6 inch desktop thermal ALD tool on the market. Customizable chucks/chambers/platens (for small or 3D parts). Can hold square substrates.
The AT810 model is an 8-inch desktop thermal ALD system. Customizable chucks/chambers/platens (for small or 3D parts or multiples (batch runs)). Can hold square substrates.
Compare ALD equipment and systems manufactured by Anric Technologies. Compare by size and capability.
AT200M
AT410/610/810
AT650T
AT650P
Desktop (W: ~11” (27.9cm) x D: 15” (38.1cm) x H: 14.5” (36.8cm))
Desktop (W: 24.5” (62.3cm) x D: 24” (61cm) x H: 15.75” (40.5cm))[610 D: 25″ (63.5cm)]
Desktop (W: 15” (38.1cm) x D: 15” (38.1cm) x H: Less that 38” (96.5cm))
Desktop (W: 15” (38.1cm) x D: 15” (38.1cm) x H: 38” (96.5cm))
Sample Size = 2 inch (x2) up to 2 x 2 x 2” volume
410 = 4 inch; 610 = 6 inch; 810 = 8 inch
6 inch
6 inch
Thermal to 300°C
Thermal to 320°C
Thermal to 400°C
(upgradeable to Plasma)
Plasma and Thermal to
400°C
One Precursor/One Counter
Reactant
Three Precursors/ Up to Three Counter
Reactants
Four Precursors/Four
Counter Reactants
Four Precursors/Four
Counter Reactants
Heated Precursor to 150°C
Heated Precursor to 180°C (N2 Assist Available)
3 Precursors to 185°C (with optional pressure boost) , 1 at RT
3 Precursors to 185°C (with optional pressure boost) , 1 at RT
All stainless steel chamber and metal sealed stainless lines
All aluminum chamber (hot walled) and metal sealed stainless lines
All aluminum chamber (warm walled) and metal sealed stainless lines and chuck
All aluminum chamber (warm walled) and metal sealed stainless lines and chuck
Heated lines and fast pulsing ALD valves
Heated lines and fast pulsing ALD valves
Heated lines and fast pulsing ALD valves
Heated lines and fast pulsing ALD valves
Ultrafast MFC
Ultrafast MFC
Up to four ultrafast MFCs
Up to four ultrafast MFCs
5” Display w. Integrated
PLC
7“ Display with integrated
PLC
10“ Display with integrated
PLC
10“ Display with integrated
PLC
Have Questions About ALD Equipment?
Our team is here to help you find the right Atomic Layer Deposition system. Contact us today to start a conversation. If you don’t think we have the ALD equipment you need, you will be surprised!