The Anric Technologies AT400 ALD system was recently used by Professor Rosticher at the CNRS in Paris to grow an Al2O3 as a passivation layer for graphene capacitor device.

AT400

Read more about Professor Rosticher publication here: https://arxiv.org/abs/1806.08615

 

https://iopscience.iop.org/article/10.1088/1361-6528/aabf53/meta

https://onlinelibrary.wiley.com/doi/abs/10.1002/adma.201802990

Anric Technologies will be hosting a booth at the upcoming AVS ALD conference. link: https://ald2019.avs.org/sponsors-exhibitors/